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Trench filling with phosphorus-doped monocrystalline and po..:

Lespiaux, J. ; Deprat, F. ; Rodrigues Goncalves, B....
Materials Science in Semiconductor Processing.  144 (2022)  - p. 106549 , 2022
Link: https://doi.org/10.1016/j.mssp.2022.106549