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1 Ergebnisse
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Synergistic effect of aminosilane and K2CO3 on improving Ch..:
Zhao, Qun
;
Xie, Shunfan
;
Wang, Hanxiao
...
Materials Science in Semiconductor Processing. 146 (2022) - p. 106702 , 2022
Link:
https://doi.org/10.1016/j.mssp.2022.106702
RT Journal T1 <Title>Synergistic effect of aminosilane and K2CO3 on improving Chemical Mechanical Polishing performance of SiO2 dielectric layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2022.106702&Exemplar=1&LAN=DE A1 Zhao, Qun A1 Xie, Shunfan A1 Wang, Hanxiao A1 Yang, Luyao A1 Mei, Xukun A1 He, Yangang PB Elsevier BV YR 2022 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 146 SP 106702 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2022.106702 DO https://doi.org/10.1016/j.mssp.2022.106702 SF ELIB - SuUB Bremen
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