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1 Ergebnisse
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Hydrogen etching of 4H–SiC(0001) facet and step formation:
Li, Rui
;
Zhang, Kaimin
;
Zhang, Yi
...
Materials Science in Semiconductor Processing. 149 (2022) - p. 106896 , 2022
Link:
https://doi.org/10.1016/j.mssp.2022.106896
RT Journal T1 <Title>Hydrogen etching of 4H–SiC(0001) facet and step formation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2022.106896&Exemplar=1&LAN=DE A1 Li, Rui A1 Zhang, Kaimin A1 Zhang, Yi A1 Zhang, Zhenzhen A1 Ji, Peixuan A1 Shi, Chengqian A1 Hao, Danni A1 Zhang, Yipeng A1 Moro, Ramiro A1 Ma, Yanqing A1 Ma, Lei PB Elsevier BV YR 2022 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 149 SP 106896 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2022.106896 DO https://doi.org/10.1016/j.mssp.2022.106896 SF ELIB - SuUB Bremen
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