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1 Ergebnisse
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Effect of slurry particles on PVA brush contamination durin..:
Sahir, Samrina
;
Cho, Hwi-Won
;
Jalalzai, Palwasha
...
Materials Science in Semiconductor Processing. 151 (2022) - p. 107043 , 2022
Link:
https://doi.org/10.1016/j.mssp.2022.107043
RT Journal T1 <Title>Effect of slurry particles on PVA brush contamination during post-CMP cleaning</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2022.107043&Exemplar=1&LAN=DE A1 Sahir, Samrina A1 Cho, Hwi-Won A1 Jalalzai, Palwasha A1 Samanta, Suprakash A1 Hamada, Satomi A1 Kim, Tae-Gon A1 Park, Jin-Goo PB Elsevier BV YR 2022 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 151 SP 107043 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2022.107043 DO https://doi.org/10.1016/j.mssp.2022.107043 SF ELIB - SuUB Bremen
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