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Fabrication of GaN-air channels for embedded photonic struc..:

Sawicka, Marta ; Gołyga, Oliwia ; Fiuczek, Natalia...
Materials Science in Semiconductor Processing.  155 (2023)  - p. 107234 , 2023
Link: https://doi.org/10.1016/j.mssp.2022.107234