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1 Ergebnisse
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Application of SCF-LTDP technology for a-Si:H film defectiv..:
Chen, Jian-Jie
;
Chen, Min-Chen
;
Chang, Ting-Chang
...
Materials Science in Semiconductor Processing. 156 (2023) - p. 107264 , 2023
Link:
https://doi.org/10.1016/j.mssp.2022.107264
RT Journal T1 <Title>Application of SCF-LTDP technology for a-Si:H film defective passivation in X-ray PIN-based photosensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2022.107264&Exemplar=1&LAN=DE A1 Chen, Jian-Jie A1 Chen, Min-Chen A1 Chang, Ting-Chang A1 Chen, Hong-Chih A1 Zhou, Kuan-Ju A1 Kuo, Chuan-Wei A1 Yang, Chih-Cheng A1 Wu, Pei-Yu A1 Shih, Chih-Cheng A1 Huang, Jen-Wei PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 156 SP 107264 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2022.107264 DO https://doi.org/10.1016/j.mssp.2022.107264 SF ELIB - SuUB Bremen
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