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Quantitative analysis of irregular channel shape effects on..:
Park, Chanyang
;
Yoon, Jun-Sik
;
Nam, Kihoon
...
Materials Science in Semiconductor Processing. 157 (2023) - p. 107333 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107333
RT Journal T1 <Title>Quantitative analysis of irregular channel shape effects on charge-trapping efficiency using massive 3D NAND data</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107333&Exemplar=1&LAN=DE A1 Park, Chanyang A1 Yoon, Jun-Sik A1 Nam, Kihoon A1 Jang, Hyundong A1 Park, Min Sang A1 Baek, Rock-Hyun PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 157 SP 107333 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107333 DO https://doi.org/10.1016/j.mssp.2023.107333 SF ELIB - SuUB Bremen
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