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1 Ergebnisse
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Effect of stress on fluorite-structured ferroelectric thin ..:
Lee, Younghwan
;
Jeong, Hyun Woo
;
Kim, Se Hyun
..
Materials Science in Semiconductor Processing. 160 (2023) - p. 107411 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107411
RT Journal T1 <Title>Effect of stress on fluorite-structured ferroelectric thin films for semiconductor devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107411&Exemplar=1&LAN=DE A1 Lee, Younghwan A1 Jeong, Hyun Woo A1 Kim, Se Hyun A1 Yang, Kun A1 Park, Min Hyuk PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 160 SP 107411 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107411 DO https://doi.org/10.1016/j.mssp.2023.107411 SF ELIB - SuUB Bremen
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