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1 Ergebnisse
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Effect of ammonium halide salts on wet chemical nanoscale e..:
Samanta, Suprakash
;
Jin, Seungwan
;
Lee, Chan-Hee
...
Materials Science in Semiconductor Processing. 161 (2023) - p. 107469 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107469
RT Journal T1 <Title>Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107469&Exemplar=1&LAN=DE A1 Samanta, Suprakash A1 Jin, Seungwan A1 Lee, Chan-Hee A1 Lee, Seong-Soo A1 Struyf, Herbert A1 Kim, Tae-Gon A1 Park, Jin-Goo PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 161 SP 107469 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107469 DO https://doi.org/10.1016/j.mssp.2023.107469 SF ELIB - SuUB Bremen
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