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Influences of process parameters on chemical mechanical pol..:
Xiong, Qiang
;
Luo, Ziyuan
;
Yan, Qiusheng
..
Materials Science in Semiconductor Processing. 162 (2023) - p. 107499 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107499
RT Journal T1 <Title>Influences of process parameters on chemical mechanical polishing effect of ZnGeP2 crystal</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107499&Exemplar=1&LAN=DE A1 Xiong, Qiang A1 Luo, Ziyuan A1 Yan, Qiusheng A1 Lu, Jiabin A1 Pan, Jisheng PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 162 SP 107499 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107499 DO https://doi.org/10.1016/j.mssp.2023.107499 SF ELIB - SuUB Bremen
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