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Understanding the role of surface mechanical properties in ..:
Huang, Yuhua
;
Zhou, Yuqi
;
Li, Jinming
.
Materials Science in Semiconductor Processing. 163 (2023) - p. 107594 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107594
RT Journal T1 <Title>Understanding the role of surface mechanical properties in SiC surface machining</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107594&Exemplar=1&LAN=DE A1 Huang, Yuhua A1 Zhou, Yuqi A1 Li, Jinming A1 Zhu, Fulong PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 163 SP 107594 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107594 DO https://doi.org/10.1016/j.mssp.2023.107594 SF ELIB - SuUB Bremen
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