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1 Ergebnisse
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Silicon oxynitride thin films by plasma-enhanced atomic lay..:
Yang, Hae Lin
;
Kim, Tae-Yeon
;
Park, Gi-Beom
...
Materials Science in Semiconductor Processing. 164 (2023) - p. 107607 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107607
RT Journal T1
Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107607&Exemplar=1&LAN=DE A1 Yang, Hae Lin A1 Kim, Tae-Yeon A1 Park, Gi-Beom A1 Yoon, Ara A1 Song, Ki-cheol A1 Lee, Yeonhee A1 Park, Jongryul A1 Kang, Taehyeong A1 Park, Yongjoo A1 Park, Jin-Seong PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 164 SP 107607 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107607 DO https://doi.org/10.1016/j.mssp.2023.107607 SF ELIB - SuUB Bremen
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