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Investigation of the impact of amorphous silicon layers dep..:
Kissinger, Gudrun
;
Kot, Dawid
;
Bärwolf, Florian
.
Materials Science in Semiconductor Processing. 164 (2023) - p. 107614 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107614
RT Journal T1
Investigation of the impact of amorphous silicon layers deposited by PECVD and HDP-CVD on oxide precipitation in silicon
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107614&Exemplar=1&LAN=DE A1 Kissinger, Gudrun A1 Kot, Dawid A1 Bärwolf, Florian A1 Lisker, Marco PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 164 SP 107614 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107614 DO https://doi.org/10.1016/j.mssp.2023.107614 SF ELIB - SuUB Bremen
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