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1 Ergebnisse
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Reduced amount of contamination particle generated by CF4/A..:
Kim, Minjoong
;
Choi, Eunmi
;
So, Jongho
...
Materials Science in Semiconductor Processing. 167 (2023) - p. 107809 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107809
RT Journal T1
Reduced amount of contamination particle generated by CF4/Ar/O2 plasma corrosion of Y2O3 materials: Influence of defluorination process
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107809&Exemplar=1&LAN=DE A1 Kim, Minjoong A1 Choi, Eunmi A1 So, Jongho A1 Maeng, Seonjeong A1 Chung, Chin-Wook A1 Suh, Song-Moon A1 Yun, Ju-Young PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 167 SP 107809 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107809 DO https://doi.org/10.1016/j.mssp.2023.107809 SF ELIB - SuUB Bremen
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