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Processing of PtSe2 ultra-thin layers using Ar plasma:
Koczorowski, Wojciech
;
Raczyński, Jan
;
El-Ahmar, Semir
...
Materials Science in Semiconductor Processing. 167 (2023) - p. 107814 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107814
RT Journal T1 <Title>Processing of PtSe2 ultra-thin layers using Ar plasma</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107814&Exemplar=1&LAN=DE A1 Koczorowski, Wojciech A1 Raczyński, Jan A1 El-Ahmar, Semir A1 Nowak, Ewelina A1 Nowicki, Marek A1 Szybowicz, Mirosław A1 Czajka, Ryszard PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 167 SP 107814 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107814 DO https://doi.org/10.1016/j.mssp.2023.107814 SF ELIB - SuUB Bremen
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