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Effect of flux rate on the growth of AlN films on sapphire ..:
Song, Yuxuan
;
Zhang, Hui
;
Lin, Xiangyu
...
Materials Science in Semiconductor Processing. 168 (2023) - p. 107843 , 2023
Link:
https://doi.org/10.1016/j.mssp.2023.107843
RT Journal T1 <Title>Effect of flux rate on the growth of AlN films on sapphire by MNVPE</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107843&Exemplar=1&LAN=DE A1 Song, Yuxuan A1 Zhang, Hui A1 Lin, Xiangyu A1 Xie, Xinjian A1 Li, Chaoyuan A1 Bian, Lifeng A1 Chen, Guifeng PB Elsevier BV YR 2023 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 168 SP 107843 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107843 DO https://doi.org/10.1016/j.mssp.2023.107843 SF ELIB - SuUB Bremen
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