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1 Ergebnisse
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MEMS-based piezoresistive and capacitive microphones: A rev..:
Kumar, Ashish
;
Varghese, Arathy
;
Kalra, Dheeraj
...
Materials Science in Semiconductor Processing. 169 (2024) - p. 107879 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.107879
RT Journal T1 <Title>MEMS-based piezoresistive and capacitive microphones: A review on materials and methods</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107879&Exemplar=1&LAN=DE A1 Kumar, Ashish A1 Varghese, Arathy A1 Kalra, Dheeraj A1 Raunak, Anshuman A1 Jaiverdhan A1 Prasad, Mahanth A1 Janyani, Vijay A1 Yadav, R.P. PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 169 SP 107879 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107879 DO https://doi.org/10.1016/j.mssp.2023.107879 SF ELIB - SuUB Bremen
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