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1 Ergebnisse
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Theoretical and experimental analysis for the surface shape..:
Yang, Lei
;
Guo, Xiaoguang
;
Kang, Renke
...
Materials Science in Semiconductor Processing. 169 (2024) - p. 107917 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.107917
RT Journal T1 <Title>Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107917&Exemplar=1&LAN=DE A1 Yang, Lei A1 Guo, Xiaoguang A1 Kang, Renke A1 Zhu, Xianglong A1 Zhu, Zijun A1 Jia, Yufan PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 169 SP 107917 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107917 DO https://doi.org/10.1016/j.mssp.2023.107917 SF ELIB - SuUB Bremen
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