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Radiation defects as probes for the copper and nickel conta..:
Yarykin, Nikolai
;
Weber, Jörg
Materials Science in Semiconductor Processing. 169 (2024) - p. 107938 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.107938
RT Journal T1 <Title>Radiation defects as probes for the copper and nickel contamination during the chemomechanical polishing of Si wafers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.107938&Exemplar=1&LAN=DE A1 Yarykin, Nikolai A1 Weber, Jörg PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 169 SP 107938 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.107938 DO https://doi.org/10.1016/j.mssp.2023.107938 SF ELIB - SuUB Bremen
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