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1 Ergebnisse
1
Effect of abrasive on tribological behavior and polishing e..:
Wang, Tao
;
Yan, Qiusheng
;
Xiong, Qiang
...
Materials Science in Semiconductor Processing. 172 (2024) - p. 108059 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.108059
RT Journal T1 <Title>Effect of abrasive on tribological behavior and polishing effect of β-Ga2O3(100) substrate</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.108059&Exemplar=1&LAN=DE A1 Wang, Tao A1 Yan, Qiusheng A1 Xiong, Qiang A1 Lin, Junqiang A1 Lu, Jiabin A1 Pan, Jisheng PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 172 SP 108059 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.108059 DO https://doi.org/10.1016/j.mssp.2023.108059 SF ELIB - SuUB Bremen
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