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1 Ergebnisse
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Indium-zinc-tin-oxide thin-film-transistor reliability enha..:
Fan, Ching-Lin
;
Hsin, Tzu-Chun
;
Yu, Xiang-Wei
.
Materials Science in Semiconductor Processing. 172 (2024) - p. 108068 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.108068
RT Journal T1 <Title>Indium-zinc-tin-oxide thin-film-transistor reliability enhancement using fluoridation with CF4 reactive sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.108068&Exemplar=1&LAN=DE A1 Fan, Ching-Lin A1 Hsin, Tzu-Chun A1 Yu, Xiang-Wei A1 Lin, Zhe-Chen PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 172 SP 108068 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.108068 DO https://doi.org/10.1016/j.mssp.2023.108068 SF ELIB - SuUB Bremen
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