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Investigation on effects of thermo-mechanical coupling on r..:
Yu, Peng
;
Huang, Shenghua
;
Ren, Zhaoyong
..
Materials Science in Semiconductor Processing. 172 (2024) - p. 108083 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.108083
RT Journal T1 <Title>Investigation on effects of thermo-mechanical coupling on residual stress in lithium niobate in surface acoustic wave device</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.108083&Exemplar=1&LAN=DE A1 Yu, Peng A1 Huang, Shenghua A1 Ren, Zhaoyong A1 Liu, Jiantao A1 Liu, Yijie PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 172 SP 108083 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.108083 DO https://doi.org/10.1016/j.mssp.2023.108083 SF ELIB - SuUB Bremen
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