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1 Ergebnisse
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Numerical and experimental investigation of the effect of s..:
Le, Ba-Phuoc
;
Lin, Wei-Jie
;
Chen, Jyh-Chen
...
Materials Science in Semiconductor Processing. 172 (2024) - p. 108085 , 2024
Link:
https://doi.org/10.1016/j.mssp.2023.108085
RT Journal T1 <Title>Numerical and experimental investigation of the effect of side injectors on the deposition rate near the wafer edge during atmospheric pressure chemical vapor deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2023.108085&Exemplar=1&LAN=DE A1 Le, Ba-Phuoc A1 Lin, Wei-Jie A1 Chen, Jyh-Chen A1 Hu, Chieh A1 Tu, Chun-Chin A1 Chen, Liang-Chin PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 172 SP 108085 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2023.108085 DO https://doi.org/10.1016/j.mssp.2023.108085 SF ELIB - SuUB Bremen
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