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1 Ergebnisse
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Mechanism analysis and process optimization of nanogrinding..:
Xia, Jiangnan
;
Yan, Qiusheng
;
Pan, Jisheng
...
Materials Science in Semiconductor Processing. 175 (2024) - p. 108218 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108218
RT Journal T1 <Title>Mechanism analysis and process optimization of nanogrinding single-crystal SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108218&Exemplar=1&LAN=DE A1 Xia, Jiangnan A1 Yan, Qiusheng A1 Pan, Jisheng A1 Wu, Lijie A1 Chen, Yuanjing A1 Wang, Tao PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 175 SP 108218 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108218 DO https://doi.org/10.1016/j.mssp.2024.108218 SF ELIB - SuUB Bremen
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