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1 Ergebnisse
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Influence of SiO2–ZnO mixed soft abrasive on tribological b..:
Luo, Ziyuan
;
Lu, Jiabin
;
Yan, Qiusheng
..
Materials Science in Semiconductor Processing. 176 (2024) - p. 108318 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108318
RT Journal T1 <Title>Influence of SiO2–ZnO mixed soft abrasive on tribological behavior and polishing performance of sapphire wafer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108318&Exemplar=1&LAN=DE A1 Luo, Ziyuan A1 Lu, Jiabin A1 Yan, Qiusheng A1 Hu, Da A1 Zhou, Yongze PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 176 SP 108318 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108318 DO https://doi.org/10.1016/j.mssp.2024.108318 SF ELIB - SuUB Bremen
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