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1 Ergebnisse
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Atomic-scale simulation of ultrasonic vibration-assisted po..:
He, Huan
;
Gao, Tinghong
;
Liu, Yutao
...
Materials Science in Semiconductor Processing. 176 (2024) - p. 108323 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108323
RT Journal T1 <Title>Atomic-scale simulation of ultrasonic vibration-assisted polishing process for graphene/GaN-layered composites</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108323&Exemplar=1&LAN=DE A1 He, Huan A1 Gao, Tinghong A1 Liu, Yutao A1 Chen, Qian A1 Xie, Quan A1 Liang, Yongchao A1 Xiao, Qingquan PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 176 SP 108323 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108323 DO https://doi.org/10.1016/j.mssp.2024.108323 SF ELIB - SuUB Bremen
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