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1 Ergebnisse
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Preparation and patterning of HfO2 film via sol–gel method ..:
Liu, Xiaoqin
;
Liu, Jianbo
;
Li, Wei
...
Materials Science in Semiconductor Processing. 178 (2024) - p. 108463 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108463
RT Journal T1 <Title>Preparation and patterning of HfO2 film via sol–gel method and resistive switching effect of Pt/HfO2/LaNiO3</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108463&Exemplar=1&LAN=DE A1 Liu, Xiaoqin A1 Liu, Jianbo A1 Li, Wei A1 Sheng, Qingqing A1 He, Yeming A1 Wang, Yangyang PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 178 SP 108463 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108463 DO https://doi.org/10.1016/j.mssp.2024.108463 SF ELIB - SuUB Bremen
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