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1 Ergebnisse
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Low-cost O2 plasma activation assisted direct bonding of β-..:
Ma, Xu
;
Mu, Wenxiang
;
Hou, Tong
...
Materials Science in Semiconductor Processing. 179 (2024) - p. 108512 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108512
RT Journal T1 <Title>Low-cost O2 plasma activation assisted direct bonding of β-Ga2O3 and Si substrates in air</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108512&Exemplar=1&LAN=DE A1 Ma, Xu A1 Mu, Wenxiang A1 Hou, Tong A1 Dong, Yue A1 Li, Yang A1 Jia, Zhitai PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 179 SP 108512 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108512 DO https://doi.org/10.1016/j.mssp.2024.108512 SF ELIB - SuUB Bremen
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