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A review of ultra-short pulse laser micromachining of wide ..:
Jiang, Keran
;
Zhang, Peilei
;
Song, Shijie
...
Materials Science in Semiconductor Processing. 180 (2024) - p. 108559 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108559
RT Journal T1 <Title>A review of ultra-short pulse laser micromachining of wide bandgap semiconductor materials: SiC and GaN</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108559&Exemplar=1&LAN=DE A1 Jiang, Keran A1 Zhang, Peilei A1 Song, Shijie A1 Sun, Tianzhu A1 Chen, Yu A1 Shi, Haichuan A1 Yan, Hua A1 Lu, Qinghua A1 Chen, Guanglong PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 180 SP 108559 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108559 DO https://doi.org/10.1016/j.mssp.2024.108559 SF ELIB - SuUB Bremen
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