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Fractal analysis on the surface topography of Monocrystalli..:
Liu, Tengyun
;
Zhang, Peirong
;
Su, Yancai
.
Materials Science in Semiconductor Processing. 180 (2024) - p. 108588 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108588
RT Journal T1 <Title>Fractal analysis on the surface topography of Monocrystalline silicon wafers sawn by diamond wire</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108588&Exemplar=1&LAN=DE A1 Liu, Tengyun A1 Zhang, Peirong A1 Su, Yancai A1 Sun, Yujing PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 180 SP 108588 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108588 DO https://doi.org/10.1016/j.mssp.2024.108588 SF ELIB - SuUB Bremen
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