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1 Ergebnisse
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Digital etching of AlGaN/GaN heterostructures with GaN cap ..:
Kim, Jong-Hee
;
Kim, Hyeon-Cheol
;
Jeong, Hyeon-Yeong
...
Materials Science in Semiconductor Processing. 181 (2024) - p. 108622 , 2024
Link:
https://doi.org/10.1016/j.mssp.2024.108622
RT Journal T1
Digital etching of AlGaN/GaN heterostructures with GaN cap using inductively coupled oxygen plasma process combined with wet chemical treatment
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2024.108622&Exemplar=1&LAN=DE A1 Kim, Jong-Hee A1 Kim, Hyeon-Cheol A1 Jeong, Hyeon-Yeong A1 Janardhanam, V. A1 Kumar, A. Ashok A1 Rajagopal Reddy, V. A1 Choi, Chel-Jong PB Elsevier BV YR 2024 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 181 SP 108622 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2024.108622 DO https://doi.org/10.1016/j.mssp.2024.108622 SF ELIB - SuUB Bremen
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