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Investigation of deposition parameters for VUV reflective c..:

Maier-Komor, P. ; Friese, J. ; Gernhäuser, R....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  521 (2004)  1 - p. 35-42 , 2004
Link: https://doi.org/10.1016/j.nima.2003.11.145