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Patterning large-area devices with a 5:1 reduction stepper:

Leinonen, Kari
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  555 (2005)  1-2 - p. 59-64 , 2005
Link: https://doi.org/10.1016/j.nima.2005.09.004