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Manufacturing of XEUV mirrors with a sub-nanometer surface ..:

Chkhalo, N.I. ; Kluenkov, E.B. ; Pestov, A.E....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  603 (2009)  1-2 - p. 62-65 , 2009
Link: https://doi.org/10.1016/j.nima.2008.12.160