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GEMGrid: a wafer post-processed GEM-like radiation detector:

Blanco Carballo, V.M. ; Bilevych, Y. ; Chefdeville, M....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  608 (2009)  1 - p. 86-91 , 2009
Link: https://doi.org/10.1016/j.nima.2009.06.023