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TwinGrid: A wafer post-processed multistage Micro Patterned..:

Bilevych, Y. ; Carballo, V.M. Blanco ; Chefdeville, M....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  610 (2009)  3 - p. 644-648 , 2009
Link: https://doi.org/10.1016/j.nima.2009.09.054