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Microwave-induced chemical etching (MCE): A fast etching te..:

Tripathy, S.P. ; Kolekar, R.V. ; Sunil, C....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  612 (2010)  2 - p. 421-426 , 2010
Link: https://doi.org/10.1016/j.nima.2009.10.096