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An integrated Micromegas UV-photon detector:

Melai, Joost ; Lyashenko, Alexey ; Breskin, Amos...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  633 (2011)  - p. S194-S197 , 2011
Link: https://doi.org/10.1016/j.nima.2010.06.165