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Carbon coatings for extreme-ultraviolet high-order laser ha..:

Coraggia, S. ; Frassetto, F. ; Aznarez, J.A....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  635 (2011)  1 - p. S43-S46 , 2011
Link: https://doi.org/10.1016/j.nima.2010.10.098