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Atomic layer deposited borosilicate glass microchannel plat..:

Siegmund, O.H.W. ; McPhate, J.B. ; Tremsin, A.S....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  695 (2012)  - p. 168-171 , 2012
Link: https://doi.org/10.1016/j.nima.2011.11.022