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Ex situ metrology of x-ray diffraction gratings:

Yashchuk, Valeriy V. ; McKinney, Wayne R. ; Artemiev, Nikolay A.
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  710 (2013)  - p. 59-66 , 2013
Link: https://doi.org/10.1016/j.nima.2012.10.109