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CMOS sensors in 90nm fabricated on high resistivity wafers:..:

Rivetti, A. ; Battaglia, M. ; Bisello, D....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  730 (2013)  - p. 119-123 , 2013
Link: https://doi.org/10.1016/j.nima.2013.06.068