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An internal ALD-based high voltage divider and signal circu..:

Adams, Bernhard W. ; Elagin, Andrey ; Elam, Jeffrey W....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  780 (2015)  - p. 107-113 , 2015
Link: https://doi.org/10.1016/j.nima.2015.01.034