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Processing of n+/p−/p+ strip detectors with atomic layer de..:

Härkönen, J. ; Tuovinen, E. ; Luukka, P....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  828 (2016)  - p. 46-51 , 2016
Link: https://doi.org/10.1016/j.nima.2016.04.069