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Determination of the p-spray profile for n+p silicon sensor..:

Fretwurst, E. ; Garutti, E. ; Klanner, R....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  866 (2017)  - p. 140-149 , 2017
Link: https://doi.org/10.1016/j.nima.2017.05.046