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Performance studies of atomic layer deposited microchannel ..:

Ertley, C. ; Siegmund, O. ; Cremer, T....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  912 (2018)  - p. 75-77 , 2018
Link: https://doi.org/10.1016/j.nima.2017.10.050