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History, status and prospects of producing silicon sensors ..:

Bergauer, T. ; Bartl, U. ; Blöch, D....
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  924 (2019)  - p. 1-6 , 2019
Link: https://doi.org/10.1016/j.nima.2018.06.069