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Development of silicon interposers with embedded microchann..:
Ullán, Miguel
;
Correa, Jonathan
;
Dauderys, Vainius
...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1065 (2024) - p. 169490 , 2024
Link:
https://doi.org/10.1016/j.nima.2024.169490
RT Journal T1 <Title>Development of silicon interposers with embedded microchannels and metal re-distribution layer for the integration of hybrid detector systems</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.nima.2024.169490&Exemplar=1&LAN=DE A1 Ullán, Miguel A1 Correa, Jonathan A1 Dauderys, Vainius A1 Díez, Sergio A1 Duch, Marta A1 López, Luis A1 Martínez, Leyre A1 Mas, Roser A1 Moreno, Alberto PB Elsevier BV YR 2024 SN 0168-9002 JF Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment VO 1065 SP 169490 LK http://dx.doi.org/https://doi.org/10.1016/j.nima.2024.169490 DO https://doi.org/10.1016/j.nima.2024.169490 SF ELIB - SuUB Bremen
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