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Assessment of subsurface damage in polished II–VI semicondu..:

Lucca, D.A. ; Wetteland, C.J. ; Misra, A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  219-220 (2004)  - p. 611-617 , 2004
Link: https://doi.org/10.1016/j.nimb.2004.01.129