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Implantation of P ions in SiO2 layers with embedded Si nano..:

Kachurin, G.A ; Cherkova, S.G ; Volodin, V.A...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  222 (2004)  3-4 - p. 497-504 , 2004
Link: https://doi.org/10.1016/j.nimb.2004.03.076